JPH0187542U - - Google Patents
Info
- Publication number
- JPH0187542U JPH0187542U JP18463287U JP18463287U JPH0187542U JP H0187542 U JPH0187542 U JP H0187542U JP 18463287 U JP18463287 U JP 18463287U JP 18463287 U JP18463287 U JP 18463287U JP H0187542 U JPH0187542 U JP H0187542U
- Authority
- JP
- Japan
- Prior art keywords
- base
- support groove
- entrance
- top plate
- support frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 5
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18463287U JPH0187542U (en]) | 1987-12-03 | 1987-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18463287U JPH0187542U (en]) | 1987-12-03 | 1987-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187542U true JPH0187542U (en]) | 1989-06-09 |
Family
ID=31475978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18463287U Pending JPH0187542U (en]) | 1987-12-03 | 1987-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187542U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6263442A (ja) * | 1985-09-14 | 1987-03-20 | Oki Electric Ind Co Ltd | ウエハ移載装置 |
-
1987
- 1987-12-03 JP JP18463287U patent/JPH0187542U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6263442A (ja) * | 1985-09-14 | 1987-03-20 | Oki Electric Ind Co Ltd | ウエハ移載装置 |